Residual & Process Gas Analysis by SPOES
Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.
Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.
These...
![[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics](https://inteleg.io/269-side_product_default/-app-note-002-oes-actinometry-intelegR-ai-oes-actinometry-for-h2-ar-plasma-diagnostics.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-side_product_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)](https://inteleg.io/267-side_product_default/-fbo-6ust2-14-ex-vacuum-fibre-optical-cable-for-intelegR-2b-pem-length-900cm.jpg)
![[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )](https://inteleg.io/265-side_product_default/-fbo-bust2-15-10-72-ex-vacuum-fibre-optical-y-cable-length-150cm-leg1-100cm-leg2-100cm-.jpg)

![[CLC-120-UVAR-F12] Collection lens for high vacuum](https://inteleg.io/264-side_product_default/-clc-120-uvar-f12-collection-lens-for-high-vacuum.jpg)
![[VCM-DAS-3A] PC/104,ET, 16 ANALOG, 24 DIGITAL](https://inteleg.io/263-side_product_default/-vcm-das-3a-pc-104et-16-analog-24-digital.jpg)
![[210-1203E-10] Protective window D25.4x3 mm (pack of 10)](https://inteleg.io/262-side_product_default/-210-1203e-10-protective-window-d254x3-mm-pack-of-10.jpg)
![[1001000359-10] Protective window D12.7x3 mm (pack of 10)](https://inteleg.io/261-side_product_default/-1001000359-10-protective-window-d127x3-mm-pack-of-10.jpg)
![[1001000437-10] Protective window D8x1 mm (pack of 10)](https://inteleg.io/260-side_product_default/-1001000437-10-protective-window-d8x1-mm-pack-of-10.jpg)


![[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system](https://inteleg.io/244-home_default/-isim-kf40p-1-intelegR-s-im-spoes-gas-analysis-system.jpg)
![[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system](https://inteleg.io/244-medium_default/-isim-kf40p-1-intelegR-s-im-spoes-gas-analysis-system.jpg)
![[FDT-FSMA-05BP-9] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 200 μm)](https://inteleg.io/242-home_default/-fdt-fsma-05bp-9-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-70-mm-core-diameter-200-mm.jpg)
![[FDT-FSMA-05BP-9] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 200 μm)](https://inteleg.io/242-medium_default/-fdt-fsma-05bp-9-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-70-mm-core-diameter-200-mm.jpg)
![[FDT-FSMA-05BP-8] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 100 μm)](https://inteleg.io/241-home_default/-fdt-fsma-05bp-8-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-70-mm-core-diameter-100-mm.jpg)
![[FDT-FSMA-05BP-8] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 100 μm)](https://inteleg.io/241-medium_default/-fdt-fsma-05bp-8-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-70-mm-core-diameter-100-mm.jpg)
![[FDT-FSMA-05BP-7] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 1000 μm)](https://inteleg.io/240-home_default/-fdt-fsma-05bp-7-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-70-mm-core-diameter-1000-mm.jpg)
![[FDT-FSMA-05BP-7] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 1000 μm)](https://inteleg.io/240-medium_default/-fdt-fsma-05bp-7-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-70-mm-core-diameter-1000-mm.jpg)
![[FDT-FSMA-05BP-6] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 600 μm)](https://inteleg.io/239-home_default/-fdt-fsma-05bp-6-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-600-mm.jpg)
![[FDT-FSMA-05BP-6] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 600 μm)](https://inteleg.io/239-medium_default/-fdt-fsma-05bp-6-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-600-mm.jpg)
![[FDT-FSMA-05BP-5] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 400 μm)](https://inteleg.io/238-home_default/-fdt-fsma-05bp-5-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-400-mm.jpg)
![[FDT-FSMA-05BP-5] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 400 μm)](https://inteleg.io/238-medium_default/-fdt-fsma-05bp-5-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-400-mm.jpg)
![[FDT-FSMA-05BP-3] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 200 μm)](https://inteleg.io/237-home_default/-fdt-fsma-05bp-3-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-200-mm.jpg)
![[FDT-FSMA-05BP-3] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 200 μm)](https://inteleg.io/237-medium_default/-fdt-fsma-05bp-3-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-200-mm.jpg)
![[FDT-FSMA-05BP-2] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 100 μm)](https://inteleg.io/236-home_default/-fdt-fsma-05bp-2-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-100-mm.jpg)
![[FDT-FSMA-05BP-2] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 100 μm)](https://inteleg.io/236-medium_default/-fdt-fsma-05bp-2-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-80-mm-core-diameter-100-mm.jpg)
![[FDT-FSMA-05BP-18] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 600 μm)](https://inteleg.io/235-home_default/-fdt-fsma-05bp-18-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-600-mm.jpg)
![[FDT-FSMA-05BP-18] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 600 μm)](https://inteleg.io/235-medium_default/-fdt-fsma-05bp-18-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-600-mm.jpg)
![[FDT-FSMA-05BP-17] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 400 μm)](https://inteleg.io/234-home_default/-fdt-fsma-05bp-17-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-400-mm.jpg)
![[FDT-FSMA-05BP-17] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 400 μm)](https://inteleg.io/234-medium_default/-fdt-fsma-05bp-17-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-400-mm.jpg)
![[FDT-FSMA-05BP-16] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 300 μm)](https://inteleg.io/233-home_default/-fdt-fsma-05bp-16-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-300-mm.jpg)
![[FDT-FSMA-05BP-16] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 300 μm)](https://inteleg.io/233-medium_default/-fdt-fsma-05bp-16-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-300-mm.jpg)
![[FDT-FSMA-05BP-15] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 200 μm)](https://inteleg.io/232-home_default/-fdt-fsma-05bp-15-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-200-mm.jpg)
![[FDT-FSMA-05BP-15] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 60 mm, Core diameter : 200 μm)](https://inteleg.io/232-medium_default/-fdt-fsma-05bp-15-fiber-optical-feedthrough-fsma-fsma-na-022-multimode-length-60-mm-core-diameter-200-mm.jpg)