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[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
  • New
[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
[IAIOES-341C0240MB-19] Inteleg® control and monitoring system
  • New
[IAIOES-341C0240MB-19] Inteleg® control and monitoring system
[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)
  • New
[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)
[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
  • New
[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
  • New
[CTA-10-7] Collimating Tube Assembly (Feedthrough : 107mm, Flange : KF25, Angle : 90 deg., CT : 40mm, Purge : Argon)
[CLC-120-UVAR-F12] Collection lens for high vacuum
  • New
[CLC-120-UVAR-F12] Collection lens for high vacuum

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  • New
    [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
    [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
    • New
      [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
      [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
      • New
        [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
        Digital documents
        Product Type: Technical Application Note Audience: Process Engineers, Plasma Tool OEMs, R&D Teams, Quality & Process Control Specialists Length: ~15 pages | Format: PDF Why This Application Note Matters Controlling atomic hydrogen concentration in plasma processes is critical for thin-film quality, etching precision, and...
        Available to order, indicated lead time applies
        [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
        • New
          [APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics
          Digital documents
          Product Type: Technical Application Note Audience: Process Engineers, Plasma Tool OEMs, R&D Teams, Quality & Process Control Specialists Length: ~15 pages | Format: PDF Why This Application Note Matters Controlling atomic hydrogen concentration in plasma processes is critical for thin-film quality, etching precision, and...
          Available to order, indicated lead time applies
          • New
            [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
            [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
            • New
              [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
              [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
              • New
                [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
                Plasma Emission Monitoring
                Number of actuator outputs : 3 Number of BNC-type voltage inputs : 4 2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1 Trigger inputs for 2B-PEM® detectors : no External actuator power supply : 24V, included Supercaps UPS, 80-100 seconds, >500 000 cycles : not included Industrial communication (ICOMM) interface : Modbus/TCP
                Available to order, indicated lead time applies
                [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
                • New
                  [IAIOES-341C0240MB-19] Inteleg® control and monitoring system
                  Plasma Emission Monitoring
                  Number of actuator outputs : 3 Number of BNC-type voltage inputs : 4 2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1 Trigger inputs for 2B-PEM® detectors : no External actuator power supply : 24V, included Supercaps UPS, 80-100 seconds, >500 000 cycles : not included Industrial communication (ICOMM) interface : Modbus/TCP
                  Available to order, indicated lead time applies
                  • New
                    [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                    [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                    • New
                      [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                      [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                      • New
                        [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                        Fiber Optics
                        Available to order, indicated lead time applies
                        [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                        • New
                          [FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )
                          Fiber Optics
                          Available to order, indicated lead time applies
                          • New
                            [CTA-10-7] Collimating Tube Assembly (Feedthrough : 107mm, Flange : KF25, Angle : 90 deg., CT : 40mm, Purge : Argon)
                            • New
                              [CTA-10-7] Collimating Tube Assembly (Feedthrough : 107mm, Flange : KF25, Angle : 90 deg., CT : 40mm, Purge : Argon)
                              • New
                                [CTA-10-7] Collimating Tube Assembly (Feedthrough : 107mm, Flange : KF25, Angle : 90 deg., CT : 40mm, Purge : Argon)
                                Collimating Tube Assemblies
                                Available to order, indicated lead time applies
                                • New
                                  [CTA-10-7] Collimating Tube Assembly (Feedthrough : 107mm, Flange : KF25, Angle : 90 deg., CT : 40mm, Purge : Argon)
                                  Collimating Tube Assemblies
                                  Available to order, indicated lead time applies
                                  • New
                                    [CLC-120-UVAR-F12] Collection lens for high vacuum
                                    [CLC-120-UVAR-F12] Collection lens for high vacuum
                                    • New
                                      [CLC-120-UVAR-F12] Collection lens for high vacuum
                                      [CLC-120-UVAR-F12] Collection lens for high vacuum
                                      • New
                                        [CLC-120-UVAR-F12] Collection lens for high vacuum
                                        Fiber Optics
                                        Rugged, high-vacuum compatible, UV-VIS-NIR range lens for harsh process environment
                                        Available to order, indicated lead time applies
                                        [CLC-120-UVAR-F12] Collection lens for high vacuum
                                        • New
                                          [CLC-120-UVAR-F12] Collection lens for high vacuum
                                          Fiber Optics
                                          Rugged, high-vacuum compatible, UV-VIS-NIR range lens for harsh process environment
                                          Available to order, indicated lead time applies