[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.

Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.

These systems react immediately to changes in gas composition and can detect minute amounts of contamination in high-vacuum and sensitive processing environments, thus maximizing yield. Furthermore, they do not require pumping systems to perform gas analysis at process pressures.

Security policy

Delivery policy

General Terms and Conditions

Warranty

Description

MPN: ISIM-KF40P-1

ISIM-1, SPOES plasma reactor
- x2 RJ45 ports, Modbus/TCP, LED indication
- Flange : KF40, Cooling : Passive
I2BPEM-001C0000MB, Inteleg® OES control and monitoring system
- Number of physical actuator outputs : 0
- Number of BNC-type voltage inputs : 0
- 2B-PEM® high sensitivity CCD detector (200-1040nm, 1ms, 2nm) : 1
- Trigger inputs for 2B-PEM® detectors : no
- External actuator power supply : not included
- Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
- Industrial communication (ICOMM) interface : Modbus/TCP
- Embedded Atomic and Molecule Lines DB
- Real-time system info
- Real-time 2B-PEM detector info
- Self-diagnosing 2B-PEM detectors
- Wavelength calibration: typical accuracy ±0.2nm
- Linearity, counts range 3000 - 60000: <0.5%
- Linearity, counts range 1300 - 60000: ~1%
- Hot Pixel QC and Correction
- Dark base-line QC
- Anomaly Detection QC
- Radiometric Pseudo Intensity Calibration
- Radiometric Relative Intensity Calibration
FBO-6UST1-1, Ex-vacuum fibre-optical cable
- Inteleg® SMA905 to SMA905, model 2360/1/200, for Inteleg® S IM
- 70 deg. C, black PVC jacketing
- Length : 200cm

[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

EU	32	34	36	38	40	42	44	46
US	XX5	XS	S	M	L	XL	XXL	XXL
Arm Length	61	61,5	62	62,5	63	63,5	64	64,5
Bust Circumference	80	84	88	92	96	101	106	111
Waist Girth	61	65	69	73	77	82	87	92
Hip Circumference	87	91	95	99	103	108	113	118

[210-1203E] Protective window D25.4x3 mm

[APP-NOTE-001-AR-0HE-LEAK-DETECTION] Inteleg® Ar-0He™: Revolutionising Leak Detection in Vacuum Systems using SPOES

[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

[FDT-FSMA-05BP-7] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 1000 μm)

[FDT-FSMA-05BP-8] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 100 μm)

[FDT-FSMA-05BP-9] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 70 mm, Core diameter : 200 μm)

[FDT-FSMA-05BP-5] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 400 μm)

[FDT-FSMA-05BP-6] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 600 μm)

[FDT-FSMA-05BP-3] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 200 μm)

[FDT-FSMA-05BP-2] Fiber Optical Feedthrough FSMA-FSMA, NA 0.22, Multimode (Length : 80 mm, Core diameter : 100 μm)

[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system