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[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system
Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.
Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.
These systems react immediately to changes in gas composition and can detect minute amounts of contamination in high-vacuum and sensitive processing environments, thus maximizing yield. Furthermore, they do not require pumping systems to perform gas analysis at process pressures.
- Security policy
- Delivery policy
- General Terms and Conditions
- Warranty
- MPN
- ISIM-KF40P-1
- ISIM-1, SPOES plasma reactor
- x2 RJ45 ports, Modbus/TCP, LED indication
- Flange : KF40, Cooling : Passive
- I2BPEM-001C0000MB, Inteleg® OES control and monitoring system
- Number of physical actuator outputs : 0
- Number of BNC-type voltage inputs : 0
- 2B-PEM® high sensitivity CCD detector (200-1040nm, 1ms, 2nm) : 1
- Trigger inputs for 2B-PEM® detectors : no
- External actuator power supply : not included
- Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
- Industrial communication (ICOMM) interface : Modbus/TCP
- Embedded Atomic and Molecule Lines DB
- Real-time system info
- Real-time 2B-PEM detector info
- Self-diagnosing 2B-PEM detectors
- Wavelength calibration: typical accuracy ±0.2nm
- Linearity, counts range 3000 - 60000: <0.5%
- Linearity, counts range 1300 - 60000: ~1%
- Hot Pixel QC and Correction
- Dark base-line QC
- Anomaly Detection QC
- Radiometric Pseudo Intensity Calibration
- Radiometric Relative Intensity Calibration
- FBO-6UST1-1, Ex-vacuum fibre-optical cable
- Inteleg® SMA905 to SMA905, model 2360/1/200, for Inteleg® S IM
- 70 deg. C, black PVC jacketing
- Length : 200cm
Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.
Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.
These systems react immediately to changes in gas composition and can detect minute amounts of contamination in high-vacuum and sensitive processing environments, thus maximizing yield. Furthermore, they do not require pumping systems to perform gas analysis at process pressures.