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    [ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system
    [ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

    [ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

    Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.

    Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.

    These systems react immediately to changes in gas composition and can detect minute amounts of contamination in high-vacuum and sensitive processing environments, thus maximizing yield. Furthermore, they do not require pumping systems to perform gas analysis at process pressures.

    • Security policy
    • Delivery policy
    • General Terms and Conditions
    • Warranty
    MPN
    ISIM-KF40P-1
    • ISIM-1, SPOES plasma reactor
      • x2 RJ45 ports, Modbus/TCP, LED indication
      • Flange : KF40, Cooling : Passive
    • I2BPEM-001C0000MB, Inteleg® OES control and monitoring system
      • Number of physical actuator outputs : 0
      • Number of BNC-type voltage inputs : 0
      • 2B-PEM® high sensitivity CCD detector (200-1040nm, 1ms, 2nm) : 1
      • Trigger inputs for 2B-PEM® detectors : no
      • External actuator power supply : not included
      • Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
      • Industrial communication (ICOMM) interface : Modbus/TCP
      • Embedded Atomic and Molecule Lines DB
      • Real-time system info
      • Real-time 2B-PEM detector info
      • Self-diagnosing 2B-PEM detectors
      • Wavelength calibration: typical accuracy ±0.2nm
      • Linearity, counts range 3000 - 60000: <0.5%
      • Linearity, counts range 1300 - 60000: ~1%
      • Hot Pixel QC and Correction
      • Dark base-line QC
      • Anomaly Detection QC
      • Radiometric Pseudo Intensity Calibration
      • Radiometric Relative Intensity Calibration
    • FBO-6UST1-1, Ex-vacuum fibre-optical cable
      • Inteleg® SMA905 to SMA905, model 2360/1/200, for Inteleg® S IM
      • 70 deg. C, black PVC jacketing
      • Length : 200cm

    [ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system