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[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system
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[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system

Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.

Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.

These systems react immediately to changes in gas composition and can detect minute amounts of contamination in high-vacuum and sensitive processing environments, thus maximizing yield. Furthermore, they do not require pumping systems to perform gas analysis at process pressures.

  • Security policy
  • Delivery policy
  • General Terms and Conditions
  • Warranty
MPN
ISIM-KF40P-1
Brand
Inteleg
Form-Fit-Function Equivalents
-
Warranty
-
  • ISIM-1, SPOES plasma reactor
    • x2 RJ45 ports, Modbus/TCP, LED indication
    • Flange : KF40, Cooling : Passive
  • I2BPEM-001C0000MB, Inteleg® OES control and monitoring system
    • Number of physical actuator outputs : 0
    • Number of BNC-type voltage inputs : 0
    • 2B-PEM® high sensitivity CCD detector (200-1040nm, 1ms, 2nm) : 1
    • Trigger inputs for 2B-PEM® detectors : no
    • External actuator power supply : not included
    • Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
    • Industrial communication (ICOMM) interface : Modbus/TCP
    • Embedded Atomic and Molecule Lines DB
    • Real-time system info
    • Real-time 2B-PEM detector info
    • Self-diagnosing 2B-PEM detectors
    • Wavelength calibration: typical accuracy ±0.2nm
    • Linearity, counts range 3000 - 60000: <0.5%
    • Linearity, counts range 1300 - 60000: ~1%
    • Hot Pixel QC and Correction
    • Dark base-line QC
    • Anomaly Detection QC
    • Radiometric Pseudo Intensity Calibration
    • Radiometric Relative Intensity Calibration
  • FBO-6UST1-1, Ex-vacuum fibre-optical cable
    • Inteleg® SMA905 to SMA905, model 2360/1/200, for Inteleg® S IM
    • 70 deg. C, black PVC jacketing
    • Length : 200cm

[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system