Residual & Process Gas Analysis by SPOES
Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.
Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.
These...