Inteleg® short description
Plasma Emission Monitoring
Number of actuator outputs : 5
Number of BNC-type voltage inputs : 4
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 3
Trigger inputs for 2B-PEM® detectors : no
External actuator power supply : not included
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
Industrial communication (ICOMM) interface : PROFINET ...
Available to order, indicated lead time applies
Plasma Emission Monitoring
G000147R00, (2 SP, 6 AO, 4 BNC)
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Inteleg® Ar-0He™ leak detector: Zero Helium. Maximum Precision. NOTE! LIMITED AVAILABILITY. INQUIRE FOR TERMS AND CONDITIONS OF SUPPLY.
Available to order, indicated lead time applies
Inteleg® Ar-0He™ leak detector: Zero Helium. Maximum Precision.
Available to order, indicated lead time applies
Process Control and Automation
Precision fast-feedback reactive gas controller for magnetron sputtering.
Number of actuator outputs : 4 Number of BNC-type voltage (0-10V) inputs : 2 External actuator power supply : 24V, included Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
Process Control and Automation
Precision fast-feedback reactive gas controller for magnetron sputtering.
Number of actuator outputs : 8 Number of BNC-type voltage (0-10V) inputs : 8 External actuator power supply : 24V, included Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
Residual & Process Gas Analysis by SPOES
Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.
Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.
These...
Available to order, indicated lead time applies
Analog MFC control signal cable (Model : MicroFlo, Length : 2m) for Inteleg® 2B-PEM®
Available to order, indicated lead time applies