Digital documents
Product Type: Technical Application Note Audience: Process Engineers, Plasma Tool OEMs, R&D Teams, Quality & Process Control Specialists Length: ~15 pages | Format: PDF Why This Application Note Matters Controlling atomic hydrogen concentration in plasma processes is critical for thin-film quality, etching precision, and...
![[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics](https://inteleg.io/269-side_product_default/-app-note-002-oes-actinometry-intelegR-ai-oes-actinometry-for-h2-ar-plasma-diagnostics.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-side_product_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)](https://inteleg.io/267-side_product_default/-fbo-6ust2-14-ex-vacuum-fibre-optical-cable-for-intelegR-2b-pem-length-900cm.jpg)
![[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )](https://inteleg.io/265-side_product_default/-fbo-bust2-15-10-72-ex-vacuum-fibre-optical-y-cable-length-150cm-leg1-100cm-leg2-100cm-.jpg)

![[CLC-120-UVAR-F12] Collection lens for high vacuum](https://inteleg.io/264-side_product_default/-clc-120-uvar-f12-collection-lens-for-high-vacuum.jpg)
![[VCM-DAS-3A] PC/104,ET, 16 ANALOG, 24 DIGITAL](https://inteleg.io/263-side_product_default/-vcm-das-3a-pc-104et-16-analog-24-digital.jpg)
![[210-1203E-10] Protective window D25.4x3 mm (pack of 10)](https://inteleg.io/262-side_product_default/-210-1203e-10-protective-window-d254x3-mm-pack-of-10.jpg)
![[1001000359-10] Protective window D12.7x3 mm (pack of 10)](https://inteleg.io/261-side_product_default/-1001000359-10-protective-window-d127x3-mm-pack-of-10.jpg)
![[1001000437-10] Protective window D8x1 mm (pack of 10)](https://inteleg.io/260-side_product_default/-1001000437-10-protective-window-d8x1-mm-pack-of-10.jpg)


![[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics](https://inteleg.io/269-home_default/-app-note-002-oes-actinometry-intelegR-ai-oes-actinometry-for-h2-ar-plasma-diagnostics.jpg)
![[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics](https://inteleg.io/269-medium_default/-app-note-002-oes-actinometry-intelegR-ai-oes-actinometry-for-h2-ar-plasma-diagnostics.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-home_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-medium_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)](https://inteleg.io/267-home_default/-fbo-6ust2-14-ex-vacuum-fibre-optical-cable-for-intelegR-2b-pem-length-900cm.jpg)
![[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)](https://inteleg.io/267-medium_default/-fbo-6ust2-14-ex-vacuum-fibre-optical-cable-for-intelegR-2b-pem-length-900cm.jpg)
![[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )](https://inteleg.io/265-home_default/-fbo-bust2-15-10-72-ex-vacuum-fibre-optical-y-cable-length-150cm-leg1-100cm-leg2-100cm-.jpg)
![[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )](https://inteleg.io/265-medium_default/-fbo-bust2-15-10-72-ex-vacuum-fibre-optical-y-cable-length-150cm-leg1-100cm-leg2-100cm-.jpg)



![[CLC-120-UVAR-F12] Collection lens for high vacuum](https://inteleg.io/264-home_default/-clc-120-uvar-f12-collection-lens-for-high-vacuum.jpg)
![[CLC-120-UVAR-F12] Collection lens for high vacuum](https://inteleg.io/264-medium_default/-clc-120-uvar-f12-collection-lens-for-high-vacuum.jpg)
![[VCM-DAS-3A] PC/104,ET, 16 ANALOG, 24 DIGITAL](https://inteleg.io/263-home_default/-vcm-das-3a-pc-104et-16-analog-24-digital.jpg)
![[VCM-DAS-3A] PC/104,ET, 16 ANALOG, 24 DIGITAL](https://inteleg.io/263-medium_default/-vcm-das-3a-pc-104et-16-analog-24-digital.jpg)
![[210-1203E-10] Protective window D25.4x3 mm (pack of 10)](https://inteleg.io/262-home_default/-210-1203e-10-protective-window-d254x3-mm-pack-of-10.jpg)
![[210-1203E-10] Protective window D25.4x3 mm (pack of 10)](https://inteleg.io/262-medium_default/-210-1203e-10-protective-window-d254x3-mm-pack-of-10.jpg)
![[1001000359-10] Protective window D12.7x3 mm (pack of 10)](https://inteleg.io/261-home_default/-1001000359-10-protective-window-d127x3-mm-pack-of-10.jpg)
![[1001000359-10] Protective window D12.7x3 mm (pack of 10)](https://inteleg.io/261-medium_default/-1001000359-10-protective-window-d127x3-mm-pack-of-10.jpg)
![[1001000437-10] Protective window D8x1 mm (pack of 10)](https://inteleg.io/260-home_default/-1001000437-10-protective-window-d8x1-mm-pack-of-10.jpg)
![[1001000437-10] Protective window D8x1 mm (pack of 10)](https://inteleg.io/260-medium_default/-1001000437-10-protective-window-d8x1-mm-pack-of-10.jpg)
![[IFBC-MFC-CBL-6] MFC cable for IFBC (Model : MicroFlo, Length : 1m)](https://inteleg.io/257-home_default/-ifbc-mfc-cbl-6-mfc-cable-for-ifbc-model-microflo-length-1m.jpg)
![[IFBC-MFC-CBL-6] MFC cable for IFBC (Model : MicroFlo, Length : 1m)](https://inteleg.io/257-medium_default/-ifbc-mfc-cbl-6-mfc-cable-for-ifbc-model-microflo-length-1m.jpg)
![[IFBC-MFC-CBL-5] MFC cable for IFBC (Model : MicroFlo, Length : 5m)](https://inteleg.io/256-home_default/-ifbc-mfc-cbl-5-mfc-cable-for-ifbc-model-microflo-length-5m.jpg)
![[IFBC-MFC-CBL-5] MFC cable for IFBC (Model : MicroFlo, Length : 5m)](https://inteleg.io/256-medium_default/-ifbc-mfc-cbl-5-mfc-cable-for-ifbc-model-microflo-length-5m.jpg)