Inteleg® short description
            Plasma Emission Monitoring
Number of physical actuator outputs : 0 
Number of BNC-type voltage inputs : 0 
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1 
Trigger inputs for 2B-PEM® detectors : no 
External actuator power supply : not included 
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included 
Industrial communication (ICOMM) interface :...
Available to order, indicated lead time applies
             Plasma Emission Monitoring
 Optical Emission Spectroscopy (OES) and Plasma Emission Monitoring (PEM) technologies provide sophisticated, real-time, non-intrusive solutions for plasma process characterization, diagnostics, and control. OES operates in the UV-VIS-nIR range (200 to 1040 nm), offering high precision and sensitivity to detect even minor changes in plasma processes. This technology is crucial for advanced...
Available to order, indicated lead time applies
             Plasma Emission Monitoring
Number of actuator outputs : 3 
Number of BNC-type voltage inputs : 4 
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1  
Trigger inputs for 2B-PEM® detectors : no 
External actuator power supply : 24V, included 
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included 
Industrial communication (ICOMM) interface : Modbus/TCP 
Available to order, indicated lead time applies
             Plasma Emission Monitoring
Available to order, indicated lead time applies
             Plasma Emission Monitoring
Available to order, indicated lead time applies
             Plasma Emission Monitoring
Number of actuator outputs : 5 
Number of BNC-type voltage inputs : 4 
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 3 
Trigger inputs for 2B-PEM® detectors : no 
External actuator power supply : not included 
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included 
Industrial communication (ICOMM) interface : PROFINET ...
Available to order, indicated lead time applies
             Plasma Emission Monitoring
G000147R00, (2 SP, 6 AO, 4 BNC)
Available to order, indicated lead time applies
             MFC cable for Inteleg 2B-PEM (Model : MicroFlo, Length : 2m). Legacy code : SGN-12P10200
Available to order, indicated lead time applies
             Available to order, indicated lead time applies
             Plasma Emission Monitoring
Number of actuator outputs : 3 
Number of BNC-type voltage inputs : 4 
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1  
Trigger inputs for 2B-PEM® detectors : no 
External actuator power supply : 24V, included 
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included 
Industrial communication (ICOMM) interface : Modbus/TCP 
Available to order, indicated lead time applies
             Inteleg® Ar-0He™ leak detector: Zero Helium. Maximum Precision.
Available to order, indicated lead time applies
             Process Control and Automation
 Precision fast-feedback reactive gas controller for magnetron sputtering. 
 
   Number of actuator outputs : 4  Number of BNC-type voltage (0-10V) inputs : 2  External actuator power supply : 24V, included  Industrial communication (ICOMM) interface : Modbus/TCP  
  
Available to order, indicated lead time applies