Inteleg® short description
Plasma Emission Monitoring
Optical Emission Spectroscopy (OES) and Plasma Emission Monitoring (PEM) technologies provide sophisticated, real-time, non-intrusive solutions for plasma process characterization, diagnostics, and control. OES operates in the UV-VIS-nIR range (200 to 1040 nm), offering high precision and sensitivity to detect even minor changes in plasma processes. This technology is crucial for advanced...
Available to order, indicated lead time applies
Plasma Emission Monitoring
Number of actuator outputs : 3
Number of BNC-type voltage inputs : 4
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1
Trigger inputs for 2B-PEM® detectors : no
External actuator power supply : 24V, included
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
Plasma Emission Monitoring
Available to order, indicated lead time applies
Plasma Emission Monitoring
Available to order, indicated lead time applies
Plasma Emission Monitoring
Number of actuator outputs : 5
Number of BNC-type voltage inputs : 4
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 3
Trigger inputs for 2B-PEM® detectors : no
External actuator power supply : not included
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
Industrial communication (ICOMM) interface : PROFINET ...
Available to order, indicated lead time applies
Plasma Emission Monitoring
G000147R00, (2 SP, 6 AO, 4 BNC)
Available to order, indicated lead time applies
MFC cable for Inteleg 2B-PEM (Model : MicroFlo, Length : 2m). Legacy code : SGN-12P10200
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Plasma Emission Monitoring
Number of actuator outputs : 3
Number of BNC-type voltage inputs : 4
2B-PEM® high sensitivity CCD spectrometer (200-1040nm, 1ms, 2nm) detectors : 1
Trigger inputs for 2B-PEM® detectors : no
External actuator power supply : 24V, included
Supercaps UPS, 80-100 seconds, >500 000 cycles : not included
Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
Inteleg® Ar-0He™ leak detector: Zero Helium. Maximum Precision.
Available to order, indicated lead time applies
Process Control and Automation
Precision fast-feedback reactive gas controller for magnetron sputtering.
Number of actuator outputs : 4 Number of BNC-type voltage (0-10V) inputs : 2 External actuator power supply : 24V, included Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
Process Control and Automation
Precision fast-feedback reactive gas controller for magnetron sputtering.
Number of actuator outputs : 8 Number of BNC-type voltage (0-10V) inputs : 8 External actuator power supply : 24V, included Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-side_product_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)](https://inteleg.io/267-side_product_default/-fbo-6ust2-14-ex-vacuum-fibre-optical-cable-for-intelegR-2b-pem-length-900cm.jpg)
![[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )](https://inteleg.io/265-side_product_default/-fbo-bust2-15-10-72-ex-vacuum-fibre-optical-y-cable-length-150cm-leg1-100cm-leg2-100cm-.jpg)
![[CLC-120-UVAR-F12] Collection lens for high vacuum](https://inteleg.io/264-side_product_default/-clc-120-uvar-f12-collection-lens-for-high-vacuum.jpg)
![[VCM-DAS-3A] PC/104,ET, 16 ANALOG, 24 DIGITAL](https://inteleg.io/263-side_product_default/-vcm-das-3a-pc-104et-16-analog-24-digital.jpg)
![[210-1203E-10] Protective window D25.4x3 mm (pack of 10)](https://inteleg.io/262-side_product_default/-210-1203e-10-protective-window-d254x3-mm-pack-of-10.jpg)
![[1001000359-10] Protective window D12.7x3 mm (pack of 10)](https://inteleg.io/261-side_product_default/-1001000359-10-protective-window-d127x3-mm-pack-of-10.jpg)
![[1001000437-10] Protective window D8x1 mm (pack of 10)](https://inteleg.io/260-side_product_default/-1001000437-10-protective-window-d8x1-mm-pack-of-10.jpg)
![[IFBC-MFC-CBL-6] MFC cable for IFBC (Model : MicroFlo, Length : 1m)](https://inteleg.io/257-side_product_default/-ifbc-mfc-cbl-6-mfc-cable-for-ifbc-model-microflo-length-1m.jpg)
![[I2BPEM-001C0000MB] Inteleg® 2B-PEM® control and monitoring system](https://inteleg.io/224-medium_default/-i2bpem-001c0000mb-intelegR-2b-pemR-control-and-monitoring-system.jpg)
![[I2BPEM-001C0000MB] Inteleg® 2B-PEM® control and monitoring system](https://inteleg.io/224-home_default/-i2bpem-001c0000mb-intelegR-2b-pemR-control-and-monitoring-system.jpg)
![[I2BPEM-341C0240MB] Inteleg® control and monitoring system](https://inteleg.io/221-home_default/-i2bpem-341c0240mb-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-341C0240MB] Inteleg® control and monitoring system](https://inteleg.io/221-medium_default/-i2bpem-341c0240mb-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-541C0000MB] Inteleg® control and monitoring system](https://inteleg.io/249-home_default/-i2bpem-541c0000mb-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-541C0000MB] Inteleg® control and monitoring system](https://inteleg.io/249-medium_default/-i2bpem-541c0000mb-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-542C0000MB] Inteleg® control and monitoring system](https://inteleg.io/250-home_default/-i2bpem-542c0000mb-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-542C0000MB] Inteleg® control and monitoring system](https://inteleg.io/250-medium_default/-i2bpem-542c0000mb-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-543C0240PN] Inteleg® control and monitoring system](https://inteleg.io/222-home_default/-i2bpem-543c0240pn-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-543C0240PN] Inteleg® control and monitoring system](https://inteleg.io/222-medium_default/-i2bpem-543c0240pn-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-642C0246PN] Inteleg® control and monitoring system](https://inteleg.io/223-home_default/-i2bpem-642c0246pn-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-642C0246PN] Inteleg® control and monitoring system](https://inteleg.io/223-medium_default/-i2bpem-642c0246pn-intelegR-control-and-monitoring-system.jpg)
![[I2BPEM-MFC-CBL-14] MFC cable for Inteleg 2B-PEM (Model : MicroFlo, Length : 2m)](https://inteleg.io/247-home_default/-i2bpem-mfc-cbl-14-mfc-cable-for-inteleg-2b-pem-model-microflo-length-2m.jpg)
![[I2BPEM-MFC-CBL-14] MFC cable for Inteleg 2B-PEM (Model : MicroFlo, Length : 2m)](https://inteleg.io/247-medium_default/-i2bpem-mfc-cbl-14-mfc-cable-for-inteleg-2b-pem-model-microflo-length-2m.jpg)
![[I2BPEM-MFC-CBL-28] MFC cable for Inteleg 2B-PEM (Model : MC DB9M, Length : 5m)](https://inteleg.io/213-home_default/-i2bpem-mfc-cbl-28-mfc-cable-for-inteleg-2b-pem-model-mc-db9m-length-5m.jpg)
![[I2BPEM-MFC-CBL-28] MFC cable for Inteleg 2B-PEM (Model : MC DB9M, Length : 5m)](https://inteleg.io/213-medium_default/-i2bpem-mfc-cbl-28-mfc-cable-for-inteleg-2b-pem-model-mc-db9m-length-5m.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-home_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-medium_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[IAR0HE-1] Inteleg® Ar-0He™ argon-spray leak detector](https://inteleg.io/216-home_default/-iar0he-1-intelegR-ar-0he-argon-spray-leak-detector.jpg)
![[IAR0HE-1] Inteleg® Ar-0He™ argon-spray leak detector](https://inteleg.io/216-medium_default/-iar0he-1-intelegR-ar-0he-argon-spray-leak-detector.jpg)
![[IFBC-42000240MB] Inteleg® FBC control system (2 BNC, 4 MFC)](https://inteleg.io/205-home_default/-ifbc-42000240mb-intelegR-fbc-control-system-2-bnc-4-mfc.jpg)
![[IFBC-42000240MB] Inteleg® FBC control system (2 BNC, 4 MFC)](https://inteleg.io/205-medium_default/-ifbc-42000240mb-intelegR-fbc-control-system-2-bnc-4-mfc.jpg)
![[IFBC-88000240MB] Inteleg® FBC control system (8 BNC, 8 MFC)](https://inteleg.io/204-home_default/-ifbc-88000240mb-intelegR-fbc-control-system-8-bnc-8-mfc.jpg)
![[IFBC-88000240MB] Inteleg® FBC control system (8 BNC, 8 MFC)](https://inteleg.io/204-medium_default/-ifbc-88000240mb-intelegR-fbc-control-system-8-bnc-8-mfc.jpg)