Inteleg® short description
Process Control and Automation
Precision fast-feedback reactive gas controller for magnetron sputtering.
Number of actuator outputs : 8 Number of BNC-type voltage (0-10V) inputs : 8 External actuator power supply : 24V, included Industrial communication (ICOMM) interface : Modbus/TCP
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Available to order, indicated lead time applies
Residual & Process Gas Analysis by SPOES
Inteleg® S is a family of gas analyzer systems based on SPOES technology, designed to align with Industry 4.0 standards. These systems provide reliable 24/7 monitoring, feedback-driven control, and optimization of physical processes.
Inteleg® S utilizes unique miniature plasma cell designs for real-time gas analysis under various high-vacuum and process conditions.
These...
Available to order, indicated lead time applies
Analog MFC control signal cable (Model : MicroFlo, Length : 2m) for Inteleg® 2B-PEM®
Available to order, indicated lead time applies
Available to order, indicated lead time applies
![[APP-NOTE-002-OES-ACTINOMETRY] Inteleg® AI-OES™: Actinometry for H2/Ar Plasma Diagnostics](https://inteleg.io/269-side_product_default/-app-note-002-oes-actinometry-intelegR-ai-oes-actinometry-for-h2-ar-plasma-diagnostics.jpg)
![[IAIOES-341C0240MB-19] Inteleg® control and monitoring system](https://inteleg.io/268-side_product_default/-iaioes-341c0240mb-19-intelegR-control-and-monitoring-system.jpg)
![[FBO-6UST2-14] Ex-vacuum fibre-optical cable for Inteleg® 2B-PEM (Length : 900cm)](https://inteleg.io/267-side_product_default/-fbo-6ust2-14-ex-vacuum-fibre-optical-cable-for-intelegR-2b-pem-length-900cm.jpg)
![[FBO-BUST2-1.5-1.0-72] Ex-vacuum fibre-optical Y-cable (Length : 150cm, Leg1 : 100cm, Leg2 : 100cm )](https://inteleg.io/265-side_product_default/-fbo-bust2-15-10-72-ex-vacuum-fibre-optical-y-cable-length-150cm-leg1-100cm-leg2-100cm-.jpg)
![[CLC-120-UVAR-F12] Collection lens for high vacuum](https://inteleg.io/264-side_product_default/-clc-120-uvar-f12-collection-lens-for-high-vacuum.jpg)
![[VCM-DAS-3A] PC/104,ET, 16 ANALOG, 24 DIGITAL](https://inteleg.io/263-side_product_default/-vcm-das-3a-pc-104et-16-analog-24-digital.jpg)
![[210-1203E-10] Protective window D25.4x3 mm (pack of 10)](https://inteleg.io/262-side_product_default/-210-1203e-10-protective-window-d254x3-mm-pack-of-10.jpg)
![[1001000359-10] Protective window D12.7x3 mm (pack of 10)](https://inteleg.io/261-side_product_default/-1001000359-10-protective-window-d127x3-mm-pack-of-10.jpg)
![[1001000437-10] Protective window D8x1 mm (pack of 10)](https://inteleg.io/260-side_product_default/-1001000437-10-protective-window-d8x1-mm-pack-of-10.jpg)
![[IFBC-88000240MB] Inteleg® FBC control system (8 BNC, 8 MFC)](https://inteleg.io/204-medium_default/-ifbc-88000240mb-intelegR-fbc-control-system-8-bnc-8-mfc.jpg)
![[IFBC-88000240MB] Inteleg® FBC control system (8 BNC, 8 MFC)](https://inteleg.io/204-home_default/-ifbc-88000240mb-intelegR-fbc-control-system-8-bnc-8-mfc.jpg)
![[IFBC-MFC-CBL-1] MFC cable for IFBC (Model : MicroFlo, Length : 10m)](https://inteleg.io/252-home_default/-ifbc-mfc-cbl-1-mfc-cable-for-ifbc-model-microflo-length-10m.jpg)
![[IFBC-MFC-CBL-1] MFC cable for IFBC (Model : MicroFlo, Length : 10m)](https://inteleg.io/252-medium_default/-ifbc-mfc-cbl-1-mfc-cable-for-ifbc-model-microflo-length-10m.jpg)
![[IFBC-MFC-CBL-2] MFC cable for IFBC (Model : MicroFlo, Length : 15m)](https://inteleg.io/253-home_default/-ifbc-mfc-cbl-2-mfc-cable-for-ifbc-model-microflo-length-15m.jpg)
![[IFBC-MFC-CBL-2] MFC cable for IFBC (Model : MicroFlo, Length : 15m)](https://inteleg.io/253-medium_default/-ifbc-mfc-cbl-2-mfc-cable-for-ifbc-model-microflo-length-15m.jpg)
![[IFBC-MFC-CBL-3] MFC cable for IFBC (Model : MicroFlo, Length : 2m)](https://inteleg.io/254-home_default/-ifbc-mfc-cbl-3-mfc-cable-for-ifbc-model-microflo-length-2m.jpg)
![[IFBC-MFC-CBL-3] MFC cable for IFBC (Model : MicroFlo, Length : 2m)](https://inteleg.io/254-medium_default/-ifbc-mfc-cbl-3-mfc-cable-for-ifbc-model-microflo-length-2m.jpg)
![[IFBC-MFC-CBL-4] MFC cable for IFBC (Model : MicroFlo, Length : 3m)](https://inteleg.io/255-home_default/-ifbc-mfc-cbl-4-mfc-cable-for-ifbc-model-microflo-length-3m.jpg)
![[IFBC-MFC-CBL-4] MFC cable for IFBC (Model : MicroFlo, Length : 3m)](https://inteleg.io/255-medium_default/-ifbc-mfc-cbl-4-mfc-cable-for-ifbc-model-microflo-length-3m.jpg)
![[IFBC-MFC-CBL-5] MFC cable for IFBC (Model : MicroFlo, Length : 5m)](https://inteleg.io/256-home_default/-ifbc-mfc-cbl-5-mfc-cable-for-ifbc-model-microflo-length-5m.jpg)
![[IFBC-MFC-CBL-5] MFC cable for IFBC (Model : MicroFlo, Length : 5m)](https://inteleg.io/256-medium_default/-ifbc-mfc-cbl-5-mfc-cable-for-ifbc-model-microflo-length-5m.jpg)
![[IFBC-MFC-CBL-6] MFC cable for IFBC (Model : MicroFlo, Length : 1m)](https://inteleg.io/257-home_default/-ifbc-mfc-cbl-6-mfc-cable-for-ifbc-model-microflo-length-1m.jpg)
![[IFBC-MFC-CBL-6] MFC cable for IFBC (Model : MicroFlo, Length : 1m)](https://inteleg.io/257-medium_default/-ifbc-mfc-cbl-6-mfc-cable-for-ifbc-model-microflo-length-1m.jpg)
![[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system](https://inteleg.io/244-home_default/-isim-kf40p-1-intelegR-s-im-spoes-gas-analysis-system.jpg)
![[ISIM-KF40P-1] Inteleg® S IM SPOES gas analysis system](https://inteleg.io/244-medium_default/-isim-kf40p-1-intelegR-s-im-spoes-gas-analysis-system.jpg)
![[MFC-CBL-3] MFC cable (Model : MicroFlo, Length : 2m)](https://inteleg.io/210-home_default/-mfc-cbl-3-mfc-cable-model-microflo-length-2m.jpg)
![[MFC-CBL-3] MFC cable (Model : MicroFlo, Length : 2m)](https://inteleg.io/210-medium_default/-mfc-cbl-3-mfc-cable-model-microflo-length-2m.jpg)
![[SGN-I2C10300] ICLS cable for Inteleg 2BPEM (Model: ICLS-A1, Length: 3m)](https://inteleg.io/251-home_default/-sgn-i2c10300-icls-cable-for-inteleg-2bpem-model-icls-a1-length-3m.jpg)
![[SGN-I2C10300] ICLS cable for Inteleg 2BPEM (Model: ICLS-A1, Length: 3m)](https://inteleg.io/251-medium_default/-sgn-i2c10300-icls-cable-for-inteleg-2bpem-model-icls-a1-length-3m.jpg)